Published in Rozan, E., Collado, C., Garcia, A., O'Callaghan, J.M., Pous, R., Fabrega, L., Rius, J., Rubí, R., Fontcuberta, J., & Harackiewicz, F. (1999). Design and fabrication of coplanar YBCO structures on lithium niobate substrates. IEEE Transactions on Applied Superconductivity, 9(2, Part 3, The 1998 Applied Superconductivity Conference), 2866 - 2869. ©1999 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.


YBa2Cu3O7-δ (YBCO) with low RF losses has been successfully deposited onto lithium niobate (LNO) to improve the performance of electrooptic Mach-Zender modulators. Epitaxial, c-axis oriented superconducting YBCO thin films have been grown on X-cut LNO single crystals with a yttria-stabilized zirconia (YSZ) buffer layer by RF magnetron sputtering. This buffer layer is needed to obtain good superconducting properties of the YBCO grown. Numerical tools have been developed to analyze CPW structures based on YBCO/YSZ/LNO trilayers, and they indicate that YSZ thickness has to be kept to the minimum necessary for good YBCO growth. With this restriction, the RF losses of YBCO/YSZ/LNO samples have been measured. The results from these measurements are used to quantify the performance enhancement in a Mach-Zender modulator using YBCO electrodes.