Published in Song, C., Azimuudin, S., Lee, B., Harackiewicz, F., Yen, M., Ralu, D., & Hoffman, A., Wang, P. (2006). Microwave dielectric properties of on-chip liquid films. Life Science Systems and Applications Workshop, 2006. IEEE/NLM, 1 - 2. doi: 10.1109/LSSA.2006.250401 ©2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.


A microwave characterization method for on-chip liquid film dielectric property measurement is developed. Microstrip-line based on-chip test structures are fabricated to characterize the microwave dielectric properties of various on-chip liquid films: DI water and binary mixtures of DI water with glucose and ethanol. The obtained microwave dielectric properties are presented in Cole-Cole diagrams, which show general frequency dependence similar to that of bulk liquids. Different concentration levels of glucose and ethanol show different microwave dielectric responses. Therefore, on-chip microwave dielectric spectroscopy provides a promising and inexpensive on-chip sensing mechanism for biomedical and chemical applications.