Coupling Nanowire Chemiresistors with MEMS Microhotplate Gas Sensing Platforms

Authors

Douglas C. Meier, National Institute of Standards and Technology
Steve Semancik, National Institute of Standards and Technology
Bradley Button, Southern Illinois University Carbondale
Evgheni Strelcov, Southern Illinois University Carbondale
Andrei Kolmakov, Southern Illinois University Carbondale

Comments

© 2007 American Institute of Physics

Published in Applied Physics Letters, Vol. 91 No. 6 (2007) at doi: 10.1063/1.2768861

Abstract

Recent advances in nanotechnology have yielded materials and structures that offer great potential for improving the sensitivity, selectivity, stability, and speed of next-generation chemical gas sensors. To fabricate practical devices, the “bottom-up” approach of producing nanoscale sensing elements must be integrated with the “top-down” methodology currently dominating microtechnology. In this letter, the authors illustrate this approach by coupling a single-crystal SnO₂ nanowire sensing element with a microhotplate gas sensor platform. The sensing results obtained using this prototype sensor demonstrate encouraging performance aspects including reduced operating temperature, reduced power consumption, good stability, and enhanced sensitivity.

Recommended Citation

Meier, Douglas C., Semancik, Steve, Button, Bradley, Strelcov, Evgheni and Kolmakov, Andrei. "Coupling Nanowire Chemiresistors with MEMS Microhotplate Gas Sensing Platforms." (Aug 2007).